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Profilometer
Profilometer DEKTAK 8 (Bruker).
Purchase year 2006.
The contact profilometer DEKTAK 8 is mainly used to perform 2D measurements (thin film thickness, step height for processed samples, SIMS crater depth,...)
It is also possible to obtain 3D maps of the sample surface to measure or control the roughness.
Key elements:
3 vertical measurement ranges: ± 3.25 µm / ± 32 µm / ± 130 µm
Vertical resolution: 0.1 nm in the range ± 3,25 µm
Scan length: 50 µm to 100 mm
Available styluses: 0.2 µm / 2.5 µm / 12.5 µm of tip radius of curvature
Applied force: 0.03 to 15 mg
Internal use only.
Purchase year 2006.
The contact profilometer DEKTAK 8 is mainly used to perform 2D measurements (thin film thickness, step height for processed samples, SIMS crater depth,...)
It is also possible to obtain 3D maps of the sample surface to measure or control the roughness.
Key elements:
3 vertical measurement ranges: ± 3.25 µm / ± 32 µm / ± 130 µm
Vertical resolution: 0.1 nm in the range ± 3,25 µm
Scan length: 50 µm to 100 mm
Available styluses: 0.2 µm / 2.5 µm / 12.5 µm of tip radius of curvature
Applied force: 0.03 to 15 mg
Internal use only.
